Todorov's Personal WEB Page

Electronic measurements in microtechnology and nanoengineering

1. Measurement of electrical parameters in nanotechnologies as an object of electrometry. General information about electrometric methods, means and objects of measurement. Peculiarities of using electrometric measuring equipment. Sources of errors and their presentation.

2. Noise and interference in measuring instruments and measurement objects. Sources of occurrence. Johnson noise. Shot noise. Parasitic noise effects from insulating materials. Electrostatic interference.

3. Noise and interference when connecting an object and a meter. Piezoeffects and triboelectric effects. Methods for their reduction. Increasing the noise immunity of electrometric measurements - circuit and program-algorithmic measures.

4. Electrometric measuring and measuring-stimulating devices and systems. Types, basic requirements. Sensitivity threshold. Meters and generators of very small currents. Organization of measuring circuits.

5. Stochastic measuring instruments. Principles of measurement. Measuring structures.

6. Structural elements and materials used in electrometric equipment. Parameters and basic requirements.

7. Measurement of passive and reactive parameters of elements in nanostructures. Frequency domain measurements. Compensation of parasitic circuits.

8. Measurement of parameters of semiconductor elements in nanostructures. Electrometric stimulating-measuring sources.

9. Calibration, self-testing and diagnostic procedures in electrometric measuring instruments. Methods for checking operability and metrologically guaranteed accuracy. Processing of measurement data in nanotechnologies used at high levels of interfering signals. Statistical processing of measurement information.

10. Stability of measurement results in low-voltage and ultra-high-impedance measurement technologies. Principles of circuit and program organization.

11. Application of software environments for management of electrometric measuring complexes and processing of measuring information. Systems for collecting electrometric measuring information. Principles of organization. Communication interfaces and protocols.

12. I-V and C-V electrometric measurements for determining parameters and characteristics of layers and materials used in nanotechnologies. Application of electrometric meters in physical and chemical experimental complexes.