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  Lecture Course 

Electrometry in nanoelectronics

1. Measuring electrical parameters in nanotechnology as an object of electrometry. General information about electrometric methods, means and objects of measurement. Particularities of the use of electrometric measuring equipment. Types of errors, error sources and method of presentation.
2. Noise and interference in measuring instruments and measuring objects. Sources of emergence. Johnson's noise.  Schottky noise. Parasitic noise effects of insulating materials. Electrostatic interference.
3. Noise and interference in connection of object and meter. Piezo effects and triboelectric effects. Methods for their reduction. Increasing the noise resistance of electrometeric measurements - schematic design and program - algorithmic   actions.
4. Design elements and materials used in electrometric equipment. Parameters and basic requirements.
5. Electrometric measuring and measuring - stimulating units and systems. Types, basic requirements. Sensitivity threshold. Measuring instruments and generators of very small currents. Organization of measuring circuits.
6. Calibration, self-testing and diagnostic procedures in electrometric measuring instruments. Performance check and metrological guaranteed accuracy. Principles of schematic and program design. Resistance measuring results in low-voltage and ultra-high impedance measurement technology.
7. Stachostatic measuring instruments. Measuring principles. Measuring structures.
8. Measurement of passive and reactive parameters of elements in nanostructures. Measurements in the frequency domain. Compensation of parasitic circuits.
9. Measuring parameters of the semiconductor nanostructures. Electrometric Stimulation-Measurement Sources.
10. I-V and C-V electrometer measurements to determine the parameters and characteristics of layers and materials used in nanotechnology.
11. Methods for processing measurement data in nanotechnology used for high levels of interference signals.
12. Statistical processing of measurement information.
13. Systems for collecting data information in Electrometry. Principles of organization. Communication interfaces and protocols.
14. Software management electrometric measuring devices and processing of measurement information – virtual measurement complexes based on LabVIEW, SigVIEW and AgilentVEE.
15. Application of electrometer meters in physical and chemical experiments.

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